S20 HV Dual-Target Ion Sputter Coater

Metals that can be deposited: Au, Pt, Pd, Pt-Au layered alloy, etc.

1Dual-Target Magnetron Sputtering: Patented Pt-Au Layered Recipe

2 Oil-Free High Vacuum Pump Unit: Clean & Hydrocarbon-Free

3 Tilted Target & Rotary Stage: Optimized for 3D Microstructures

Product Introduction

The S20 is a high-vacuum dual-target ion sputter coater based on magnetron sputtering technology. It integrates a turbo molecular pump and an oil-free diaphragm pump to provide an ultra-clean high-vacuum environment (<5×10⁻² Pa). Featuring a coordinated design of tilted dual-target and rotary sample stage, it deposits uniform and stable conductive coatings on sample surfaces. The system is widely suitable for (ultra-)high-resolution FE-SEM sample preparation, particularly for 3D powder samples and delicate specimens. Available sputtering materials include Au, Pt, Pd, Ir as well as Pt-Au and Pt-Pd layered alloys, etc.

Touchscreen automatic control, plug and play.

Product Specification

	Technical Specifications
Application Scenarios	Conductive Coating Preparation for HR/UHR FE-SEM Samples
Vacuum Pump	Turbo Molecular Pump + Oil-Free Diaphragm Pump
Pumping Speed	≥Diaphragm Pump 0.7 m³/h +Molecular Pump 30.5 m³/h
Ultimate Vacuum	< 5×10^-2Pa
Working Pressure	0.5-2Pa
Gas Control	Constant gas control，MFC Control（50 SCCM N₂）
Pumping Down Time	<3-5Min
Sputtering Timer	0-300S
Vacuum Gauge	High-Vacuum Composite Vacuum Gauge 【Atmospheric Pressure to 10^-3Pa Range】
Chamber Dimension	~Ø150×120mm
Rotary Sample Stage	Diameter: 80mm; Rotation Speed: 60RPM; TSD: 55-70mm continuously adjustable
Sputtering Target	Ø30×0.2-1mm/2pcs, Single-Target sputtering and Dual-Target Sequential sputtering
Sputtering Power	Constant power magnetron sputtering DC power supply Max. 30W，Max. 100mA， 0-800V DC
Gas Inlet	Ø6mm Air tube
Operating Mode	Touchscreen control，The control system provides interlock protection function
Weight	~15kg
Dimension	~250mm W×360mm D×374mm H
Power Supply	100-240V AC, 180W Max.
Warranty	1 Year
Remarks	The technical specifications and parameters listed above will be updated without prior notice. If you have any questions, please contact us.